Products

Products

Used付帯設備

We handle the used accessories such as dry pump, cryo pump, turbo pump, and others usually applied to Etching, CVD equipment. From our domestic to world network, the products have been chosen and supply it to follow the customer’s request such as ASIS, O/H including full support. Besides, we handle parts sales. Please feel free to contact us.

□ Dry Pump
□ Cryo Pump
□ Turbo Pump
□ Chiller
□ VALVE
□ Generator

Dry Pump

□ Dry Pump

We handle the general used dry pump such as Ebara, Kashiyama, Edwards. Most popularly products are, for example, Ebara AA series, Kashiyama KMB, SD series, and Edwards QMB, QDP series. Other used products are also available. Please feel free to contact us for your request products, repair.
Dry Pump Dry Pump
Cryo Pump

□ Cryo Pump

We can supply many kinds of used products such as ULVAC、CTI、Anelva. Repair is available including Adsober regenerated.
Cryo Pump Cryo Pump
Turbo PumpTurbo PumpTurbo Pump

□ Turbo Pump

We supply the used turbo pump, if you are interested in our inventory, please feel free to contact with us at any time.
Turbo Pump Turbo Pump
Chiller

□ Chiller

We can handle the used chiller, many kinds of products, also repair. If you look for the products, please feel free to contact us.
Chiller Chiller
Chiller

□ Valve

We can repair VAT, APC VALVE for Cu, Al Line, separately, STD O/H such as Disassembling, Cleaning and Assemblong, Actuator repair, parts replacement such as Solenoid VALVE, Motor Driver is also available.
Chiller Chiller
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□ Generator

Generally well known Generators, such as AE、DAIHEN、MKS is available for the service. RF, DC and Matcher is handled with full developed inspection system. For better solution, customized parts, whole power system is modified for the optimum power supply. Any used Generator is available for Sales.
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