エーサット株式会社
日本のチカラを世界のために、未来のために。
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Used付帯設備
We handle the used accessories such as dry pump, cryo pump, turbo pump, and others usually applied to Etching, CVD equipment. From our domestic to world network, the products have been chosen and supply it to follow the customer’s request such as ASIS, O/H including full support. Besides, we handle parts sales. Please feel free to contact us.
□ Dry Pump
□ Cryo Pump
□ Turbo Pump
□ Chiller
□ VALVE
□ Generator
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□ Dry Pump We handle the general used dry pump such as Ebara, Kashiyama, Edwards. Most popularly products are, for example, Ebara AA series, Kashiyama KMB, SD series, and Edwards QMB, QDP series. Other used products are also available. Please feel free to contact us for your request products, repair. |
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□ Cryo Pump We can supply many kinds of used products such as ULVAC、CTI、Anelva. Repair is available including Adsober regenerated. |
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□ Turbo Pump We supply the used turbo pump, if you are interested in our inventory, please feel free to contact with us at any time. |
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□ Chiller We can handle the used chiller, many kinds of products, also repair. If you look for the products, please feel free to contact us. |
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□ Valve We can repair VAT, APC VALVE for Cu, Al Line, separately, STD O/H such as Disassembling, Cleaning and Assemblong, Actuator repair, parts replacement such as Solenoid VALVE, Motor Driver is also available. |
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□ Generator Generally well known Generators, such as AE、DAIHEN、MKS is available for the service. RF, DC and Matcher is handled with full developed inspection system. For better solution, customized parts, whole power system is modified for the optimum power supply. Any used Generator is available for Sales. |
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