Products

Products

消耗パーツ

We supply very wider kinds of parts contributed to the cost performance, the spec highly improved. Our products have been widely applied at many users, in domestic, over the world.

□ Quartz Products
□ Si Products
□ Parts for Chamber
□ Other Quartz Products

□ ESC Regeneration
□ SiC Products
□ Bellows Products
□ Dummy/Reclaim silicon Wafer/Si Scrap

□ Quartz Products

Mainly, we handle the products set for etching chamber such as Shield Ring, Cover Ring and Insulator. These products have been applied at domestic, worldwide of device.

□ Si Products

Mainly, we handle the products set for etching chamber such as CEL, Focus Ring. These products have been applied at domestic, worldwide of device makers.

□ Parts for Chamber

Chamber Module, Shower head, Plate and so on for CVD is available. We handle the products for 8, 12 inch.

□ Other Quartz Products

We are willing to introduce you Quartz Piping, Solid Bars and so on. All-roundly Quartz are anailable.

 

□ ESC Regeneration

ESC regeneration is available for many kinds of Etching Tool, from 6 to 12 inch, which is cotributed to your cost performance. Please feel free to contact for the details.

 
 

□ SiC Products

We supply SiC suceptor for APCVD, Original Manufacturing is also available. For your request, the details, please feel free to contact us.

□ Bellows Products

We can also supply the bellows products for Vacuum. Please feel free to contact us for the details.

 
 

Dummy/Reclaim silicon Wafer/ Si Scrap

We handle Si Scrap, Broken Wafer, Ingot for Solar industry. Additionally, the products for Semiconductor industry are also available. please feel free to contact us.